Polishing process of 4H-SiC under different pressures in a water environment
Yuqi Zhou, Yuhua Huang, Jinming Li, Weishan Lv, Fulong Zhu
Topics & Concepts
PolishingMaterials scienceMachiningPhase (matter)Substrate (aquarium)Chemical-mechanical planarizationComposite materialMetallurgyChemistryGeologyOceanographyOrganic chemistryAdvanced Surface Polishing TechniquesSilicon Carbide Semiconductor TechnologiesMetal and Thin Film Mechanics