Comprehensive characterization of Al-doped ZnO thin films deposited in confocal radio frequency magnetron co-sputtering
Fatiha Challali, Tahar Touam, Valérie Bockelée, Thierry Chauveau, A. Chelouche, Nicolas Stéphant, Jonathan Hamon, Marie‐Paule Besland
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyThin filmAnalytical Chemistry (journal)Sputter depositionWurtzite crystal structureSputteringAnnealing (glass)PhotoluminescenceCavity magnetronElectrical resistivity and conductivityOptoelectronicsZincComposite materialNanotechnologyMetallurgyChemical engineeringChemistryEngineeringChromatographyElectrical engineeringZnO doping and propertiesCopper-based nanomaterials and applicationsGa2O3 and related materials