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The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM

Feyza Güzelçimen, Bükem Tanören, Çağlar Çetinkaya, Meltem Dönmez Kaya, Halil İbrahim Efkere, Yunus Özen, Doǧukan Bingöl, Merve Sirkeci, Barış Kınacı, Mehmet Burçin Ünlü, Süleyman Özçelik

2020Vacuum109 citationsDOI

Topics & Concepts

X-ray photoelectron spectroscopyMaterials scienceScanning electron microscopeSurface roughnessSubstrate (aquarium)Thin filmAnalytical Chemistry (journal)Surface finishSputter depositionSpectroscopyMicrometerSputteringOpticsNanotechnologyChemistryComposite materialNuclear magnetic resonancePhysicsChromatographyGeologyOceanographyQuantum mechanicsElectronic and Structural Properties of OxidesAnalytical Chemistry and SensorsSurface Roughness and Optical Measurements
The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM | Litcius