Wafer-scale vertical GaN nanorod arrays with nonpolar facets using TMAH wet etching
Hyesu Ryu, Hak-Jong Choi, Mandar Kulkarni, Hokyun Rho, Hyungjun Lim, Sang‐Wan Ryu, Jun‐Seok Ha, Sang Hyun Lee
Topics & Concepts
NanorodWaferMaterials scienceEtching (microfabrication)NanotechnologyScale (ratio)OptoelectronicsNanoscopic scaleLayer (electronics)PhysicsQuantum mechanicsGaN-based semiconductor devices and materialsZnO doping and propertiesNanowire Synthesis and Applications