Atomic layer deposited high quality AlN thin films for efficient thermal management
Wangle Zhang, Jianguo Li, Jia-Bin Fang, Longfei Hui, Lijun Qin, Ting Gong, Fangyuan Sun, Hao Feng
Abstract
With the development of high-power devices, thermal management has become extremely important for modern electronics.
Topics & Concepts
Materials scienceThermal management of electronic devices and systemsElectronicsLayer (electronics)ThermalAtomic layer depositionOptoelectronicsThin filmEngineering physicsNanotechnologyElectrical engineeringMechanical engineeringEngineeringPhysicsMeteorologyThermal properties of materialsGaN-based semiconductor devices and materialsSemiconductor materials and devices