Accelerated C-face polishing of silicon carbide by alkaline polishing slurries with Fe3O4 catalysts
Xuehan Wang, Jiapeng Chen, Zhengzheng Bu, Hanqiang Wang, Wenjun Wang, Weimin Li, Tao Sun
Topics & Concepts
PolishingSlurryChemical-mechanical planarizationOxidizing agentWaferSilicon carbideCatalysisMaterials scienceChemical engineeringCarbideMetallurgyNanotechnologyChemistryComposite materialOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis