The effect of spot overlap ratio on femtosecond laser planarization processing of SiC ceramics
Qingyan Lin, Zhengjie Fan, Wenjun Wang, Zhaoxuan Yan, Qingzhen Zheng, Xuesong Mei
Topics & Concepts
Materials scienceChemical-mechanical planarizationSurface roughnessComposite materialCeramicLaserSilicon carbideResidual stressFemtosecondPolishingLaser ablationSurface finishRippleOpticsPhysicsQuantum mechanicsVoltageLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma