Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment
Priyanshu Verma, Deepak Punetha, Saurabh Kumar Pandey
Topics & Concepts
Materials scienceSilicon carbidePiezoresistive effectMicroelectromechanical systemsSiliconResistorDiaphragm (acoustics)Silicon bandgap temperature sensorSensitivity (control systems)Pressure sensorOptoelectronicsComposite materialElectronic engineeringElectrical engineeringMechanical engineeringVibrationAcousticsVoltageEngineeringVoltage dividerPhysicsDropout voltageAdvanced MEMS and NEMS TechnologiesGas Sensing Nanomaterials and SensorsMechanical and Optical Resonators