Improving the crystal quality of AlN films by nanosecond laser annealing
Yigang Zhou, Jiantao Zhou, Zhiqiang Tian, Fang Dong, Sheng Liu, Jian-Gang Wang
Topics & Concepts
Materials scienceFull width at half maximumAnnealing (glass)Scanning electron microscopeLaserRaman spectroscopySapphireThin filmNanosecondAnalytical Chemistry (journal)OptoelectronicsOpticsComposite materialNanotechnologyPhysicsChemistryChromatographyGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesMetal and Thin Film Mechanics