Traveling wave distortion of MEMS ultrasonic motor induced by anisotropic elasticity
Jiangbo He, Yu Chen, Binlei Cao, Xiaoshi Li, Tianyu Yang, Zongda Hu, Longqi Ran, Wu Zhou
Topics & Concepts
Ultrasonic motorLaser Doppler vibrometerAcousticsElasticity (physics)AnisotropyDistortion (music)Traveling waveStatorMaterials scienceMicroelectromechanical systemsPhysicsOpticsMathematicsMathematical analysisVibrationWavelengthComposite materialAmplifierCMOSQuantum mechanicsOptoelectronicsDistributed feedback laserPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies