High selectivity Fe<sub>3</sub>O<sub>4</sub> nanoparticle to volatile organic compound (VOC) for MEMS gas sensors
Yu‐Jen Hsiao, Yempati Nagarjuna, Chun‐An Tsai, Sheng‐Chang Wang
Abstract
Abstract In the current study, XRD analysis shows the polycrystalline form an inverse spinel Fe 3 O 4 structure. Fe 3 O 4 film is prepared by dip coating method on MEMS gas sensors to test the sensitivity on volatile organic compound (VOC) gas. VOC is being tested at 92 mW (∼300 °C) power consumption with different VOC gas concentrations and also tested with different gases like NO 2 , SO 2 , NH 3 and CO gas. The results showed that the Fe 3 O 4 gas sensor has better selectivity and high response with VOC 1.2 ppm concentration. Structural morphology is seen and reaction mechanism when VOC gas reacts with Fe 3 O 4 material is also being discussed.
Topics & Concepts
Volatile organic compoundSelectivitySpinelCrystalliteAnalytical Chemistry (journal)Microelectromechanical systemsChemistryNanoparticleMaterials scienceGas chromatographyInorganic chemistryChemical engineeringNanotechnologyEnvironmental chemistryOrganic chemistryChromatographyMetallurgyCatalysisEngineeringGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors