Chromatic confocal precision measurement accuracy analysis with surface roughness based on a scalar diffraction and raytracing hybrid model
Haibo Liu, Donghang Li, Mengmeng Xi, Te Li, Kuo Liu, Xingjian Liu, Yongqing Wang
Topics & Concepts
Chromatic scaleOpticsDiffractionScalar (mathematics)Computer scienceConfocalSurface roughnessSurface finishMaterials sciencePhysicsGeometryMathematicsComposite materialSurface Roughness and Optical MeasurementsOptical measurement and interference techniquesPhotoacoustic and Ultrasonic Imaging