Reliability estimation of thin film platinum resistance MEMS thermal mass flowmeter by step-stress accelerated life testing
Qiaoqiao Kang, Yan Li, Jia Zhao, Jifang Tao
Topics & Concepts
Reliability (semiconductor)Accelerated life testingWeibull distributionMicroelectromechanical systemsMaterials scienceStress (linguistics)Thermal massVoltageThermal resistanceThermalElectrical engineeringComposite materialReliability engineeringElectronic engineeringEngineeringOptoelectronicsPhysicsThermodynamicsMathematicsStatisticsPower (physics)LinguisticsPhilosophyAdvanced Sensor Technologies ResearchSensor Technology and Measurement SystemsScientific Measurement and Uncertainty Evaluation