On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains
Zhonghuai Wu, Liangchi Zhang, Shengyao Yang
Topics & Concepts
Materials scienceAmorphous solidNucleationAbrasiveDeformation (meteorology)GrindingLayer (electronics)Composite materialSurface layerPhase (matter)CrystallographyCondensed matter physicsChemistryOrganic chemistryPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics