The role of third cation doping on phase stability, carrier transport and carrier suppression in amorphous oxide semiconductors
Austin S. Reed, Chandon Stone, Kwangdong Roh, Han Wook Song, Xingyu Wang, Mingyuan Liu, Dong‐Kyun Ko, Kwangsoo No, Sunghwan Lee
Abstract
Amorphous InAlZnO demonstrates greater phase stability and carrier suppression capability while maintaining a high carrier mobility for high performance TFTs.
Topics & Concepts
Materials scienceDopingAmorphous solidPhase (matter)SemiconductorOxideElectron mobilityStability (learning theory)Charge-carrier densityAmorphous semiconductorsOptoelectronicsChemical physicsCrystallographySiliconMetallurgyComputer scienceChemistryOrganic chemistryMachine learningThin-Film Transistor TechnologiesZnO doping and propertiesElectrical and Thermal Properties of Materials