Atomic/molecular layer deposition mechanism of alucone organic–inorganic hybrid materials
Zhongchao Zhou, Xu Zhang, Rui Xu, Lina Xu, Yi‐hong Ding, Hong‐Ping Xiao, Xin‐Hua Li, Aidong Li, Guoyong Fang
Topics & Concepts
Atomic layer depositionReactivity (psychology)EthylenediamineMaterials scienceHybrid materialEthylene glycolMicroelectronicsDeposition (geology)AdsorptionChemical engineeringSurface modificationOxalic acidNanotechnologyLayer (electronics)Inorganic chemistryOrganic chemistryChemistryAlternative medicinePaleontologySedimentMedicinePathologyEngineeringBiologySemiconductor materials and devicesCatalytic Processes in Materials ScienceElectronic and Structural Properties of Oxides