Progress in low energy high intensity ion implantation method development
A. I. Ryabchikov
Topics & Concepts
Materials scienceIon implantationIon beamMicrostructureIonIon beam depositionCurrent densityIon sourceFluenceComposite materialPhysicsQuantum mechanicsIon-surface interactions and analysisMetal and Thin Film MechanicsIntegrated Circuits and Semiconductor Failure Analysis