Understanding the impurity gettering effect of polysilicon/oxide passivating contact structures through experiment and simulation
AnYao Liu, Zhongshu Yang, Frank Feldmann, Jana‐Isabelle Polzin, Bernd Steinhauser, Sieu Pheng Phang, Daniel Macdonald
Topics & Concepts
GetterMaterials scienceWaferSiliconImpurityDopingDopantPlasma-enhanced chemical vapor depositionOxideFabricationChemical engineeringOptoelectronicsNanotechnologyMetallurgyChemistryMedicinePathologyEngineeringAlternative medicineOrganic chemistrySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis