Microstructure and antibacterial properties of AlCrTiZrWN high-entropy alloy nitride synthesized using HiPIMS under various N2/Ar flow ratios
Jian-Fu Tang, Jung-En Tsao, Bo-Ruei Lu, Chi-Lung Chang
Topics & Concepts
Materials scienceMicrostructureAlloyHigh-power impulse magnetron sputteringNitrideMetallurgyHigh entropy alloysChemical engineeringNanotechnologyThin filmSputter depositionSputteringEngineeringLayer (electronics)Metal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research