High-precision and large-stroke XY micropositioning stage based on serially arranged compliant mechanisms with flexure hinges
Philipp Gräser, Sebastian Linß, Felix Harfensteller, Mario Torres, Lena Zentner, René Theska
Topics & Concepts
HingeActuatorRevolute jointCoupling (piping)Rotation (mathematics)Mechanism (biology)Compliant mechanismEngineeringControl theory (sociology)Structural engineeringComputer scienceFinite element methodMechanical engineeringPhysicsElectrical engineeringArtificial intelligenceConstraint (computer-aided design)Quantum mechanicsControl (management)Piezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Measurement and Metrology Techniques