Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements
Н. Ф. Морозов, Д. А. Индейцев, V. S. Igumnova, А. В. Лукин, И. А. Попов, L. V. Shtukin
Topics & Concepts
MicrobeamNonlinear systemInertiaPhysicsAccelerationAccelerometerSensitivity (control systems)Coupling (piping)Microelectromechanical systemsAmplitudeNormal modeMechanicsMode couplingClassical mechanicsAcousticsVibrationMaterials scienceOpticsOptoelectronicsElectronic engineeringEngineeringQuantum mechanicsMetallurgyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications