Competitive effect between corrosion inhibitors in copper chemical mechanical polishing
Yongshun Zhang, Liang Jiang, Wenhui Li, Linmao Qian
Topics & Concepts
BenzotriazoleCopperCorrosionChemical-mechanical planarizationCorrosion inhibitorElectrochemistryAdsorptionMaterials scienceComposite numberMetallurgyChemistryPolishingComposite materialElectrodeOrganic chemistryPhysical chemistryAdvanced Surface Polishing TechniquesCorrosion Behavior and InhibitionMetal and Thin Film Mechanics