Electromigration behavior of silver thin film fabricated by electron-beam physical vapor deposition
Zhi Hao Jin, Yu-An Shen, Fupeng Huo, Y.C. Chan, Hiroshi Nishikawa
Topics & Concepts
ElectromigrationMaterials scienceThin filmCurrent densityElectron beam physical vapor depositionNucleationComposite materialThread (computing)CathodeNanotechnologyElectrical engineeringThermodynamicsComputer scienceQuantum mechanicsPhysicsEngineeringOperating systemElectronic Packaging and Soldering TechnologiesCopper Interconnects and ReliabilityMaterial Properties and Processing