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Phase transformation and dielectric properties of Y doped HfO2 thin films

Hailong Liang, Jin Xu, Dayu Zhou, Shiqiang Ren

2021Journal of Alloys and Compounds24 citationsDOI

Topics & Concepts

Materials scienceDielectricDopingYttriumPhase diagramThin filmPhase (matter)HafniumOptoelectronicsOxideNanotechnologyZirconiumChemistryMetallurgyOrganic chemistrySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvancements in Semiconductor Devices and Circuit Design
Phase transformation and dielectric properties of Y doped HfO2 thin films | Litcius