Phase transformation and dielectric properties of Y doped HfO2 thin films
Hailong Liang, Jin Xu, Dayu Zhou, Shiqiang Ren
Topics & Concepts
Materials scienceDielectricDopingYttriumPhase diagramThin filmPhase (matter)HafniumOptoelectronicsOxideNanotechnologyZirconiumChemistryMetallurgyOrganic chemistrySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvancements in Semiconductor Devices and Circuit Design