Optimizing HVAC systems for semiconductor fabrication: A data-intensive framework for energy efficiency and sustainability
Hsiao-Ping Ni, Wai Oswald Chong, Jui‐Sheng Chou
Topics & Concepts
HVACEnergy consumptionEfficient energy useEnergy engineeringSystems engineeringBenchmark (surveying)EngineeringEnergy conservationGreenhouse gasComputer scienceAir conditioningMechanical engineeringElectrical engineeringBiologyEcologyGeographyGeodesyBuilding Energy and Comfort OptimizationFacilities and Workplace ManagementEnergy Efficiency and Management