Grain size effect on the plasma etching behavior of spark plasma sintered yttria-stabilized zirconia ceramics
Hun Shim, Hyung‐Ho Kim, Seongwan Hong, Seongwan Hong, Jung‐Hyung Kim, Hyo‐Chang Lee, Young‐Jo Park, Sung‐Min Lee, Seong‐Hyeon Hong, Seong‐Hyeon Hong
Topics & Concepts
Materials scienceYttria-stabilized zirconiaSpark plasma sinteringGrain sizeCeramicEtching (microfabrication)Cubic zirconiaYttriumPlasma etchingSurface roughnessInductively coupled plasmaComposite materialPlasmaSinteringMetallurgyLayer (electronics)OxideQuantum mechanicsPhysicsAdvanced ceramic materials synthesisHigh-Temperature Coating BehaviorsSemiconductor materials and devices