Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography
Yu Kyoung Ryu, Arancha I. Dago, Yang He, Francisco M. Espinosa, Elena López-Elvira, Carmen Munuera, Ricardo Garcı́a
Topics & Concepts
LithographyMaterials scienceNanotechnologyNanoscopic scaleLayer (electronics)TransistorEtching (microfabrication)OxidePlasma etchingOptoelectronicsPhotolithographyPlasmaNano-NanolithographyResistMultiple patterningFabricationComposite materialElectrical engineeringMetallurgyPathologyQuantum mechanicsPhysicsAlternative medicineEngineeringVoltageMedicine2D Materials and ApplicationsNanowire Synthesis and ApplicationsMolecular Junctions and Nanostructures