Multiphysics simulation of hypersensitive microbolometer sensor using vanadium dioxide and air suspension for millimeter wave imaging
Shangyi Chen, Mark Lust, Nima Ghalichechian
Topics & Concepts
MicrobolometerMultiphysicsResponsivityMaterials scienceMicroelectromechanical systemsOptoelectronicsExtremely high frequencyMicrofabricationBolometerElectronic engineeringFinite element methodOpticsPhysicsEngineeringFabricationMedicineAlternative medicinePathologyDetectorPhotodetectorThermodynamicsTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsPolydiacetylene-based materials and applications