Litcius/Paper detail

Multiphysics simulation of hypersensitive microbolometer sensor using vanadium dioxide and air suspension for millimeter wave imaging

Shangyi Chen, Mark Lust, Nima Ghalichechian

2020Microsystem Technologies20 citationsDOI

Topics & Concepts

MicrobolometerMultiphysicsResponsivityMaterials scienceMicroelectromechanical systemsOptoelectronicsExtremely high frequencyMicrofabricationBolometerElectronic engineeringFinite element methodOpticsPhysicsEngineeringFabricationMedicineAlternative medicinePathologyDetectorPhotodetectorThermodynamicsTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsPolydiacetylene-based materials and applications