Effect of step edges on the adsorption behavior on vicinal AlN(0001) surface during metal-organic vapor phase epitaxy: An ab initio study
Toru Akiyama, Takumi Ohka, Katsuya Nagai, Tomonori Ito
Topics & Concepts
VicinalMetalorganic vapour phase epitaxyAdsorptionAb initioChemistryMetalEpitaxyAb initio quantum chemistry methodsCrystallographyHydrogenPhysical chemistryMaterials scienceComputational chemistryChemical physicsMoleculeLayer (electronics)Organic chemistryGaN-based semiconductor devices and materialsZnO doping and propertiesGa2O3 and related materials