Fluid modeling on effects of discharge parameters on ionization in capacitive radio frequency argon discharges at low pressure
Na Gao, Yan-Bin Xi, Jiang-Jiang Li, Yue Liu
Topics & Concepts
IonizationAtomic physicsArgonExcitationCapacitive sensingGround statePlasmaTorrMaterials scienceChemistryIonPhysicsThermodynamicsElectrical engineeringEngineeringOrganic chemistryQuantum mechanicsPlasma Diagnostics and ApplicationsPlasma Applications and DiagnosticsElectrohydrodynamics and Fluid Dynamics