Growth and crystal phase transformation of ε-Ga2O3 grown on 4H–SiC by MOCVD
So Yoon Kim, Jungbok Lee, Hyung-Soo Ahn, Kyounghwa Kim, Min Yang
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyEpitaxyThin filmChemical vapor depositionCrystal (programming language)Substrate (aquarium)Phase (matter)Crystal growthAnalytical Chemistry (journal)CrystallographyOptoelectronicsNanotechnologyLayer (electronics)ChemistryOceanographyComputer scienceGeologyProgramming languageChromatographyOrganic chemistryGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties