A review of advanced gas sensor based on sputtering SnO2 thin film— challenges and opportunities
Xin Tian, Zongxin Hu, Chen Jia, Hairong Wang, Xueyong Wei
Topics & Concepts
SputteringThin filmMaterials scienceMicroelectromechanical systemsSubstrate (aquarium)Context (archaeology)OptoelectronicsNanotechnologyEngineering physicsEngineeringBiologyPaleontologyOceanographyGeologyGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors