Molecular layer deposition of tin-based organic–inorganic hybrid films as photoresists
Dong Geun Kim, Kyungryul Ha, Hyekyung Kim, Woo‐Hee Kim, Tae Joo Park, Ji‐Hoon Ahn, Tae Joo Park, Ji‐Hoon Ahn
Topics & Concepts
TinLayer (electronics)Deposition (geology)Materials scienceChemical engineeringNanotechnologyChemistryMetallurgyGeologySedimentEngineeringPaleontologyAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesSemiconductor materials and devices