Growth of diamond-like carbon films with significant nanocrystalline phases in a low-pressure high-density CH4 plasma in ICP-CVD: Effect of negative dc substrate bias
Sucharita Saha, Debajyoti Das
Topics & Concepts
Materials scienceRaman spectroscopyAnalytical Chemistry (journal)Substrate (aquarium)Nanocrystalline materialChemical vapor depositionDiamondInductively coupled plasmaBand gapDiamond-like carbonThin filmSynthetic diamondPlasmaNanotechnologyOptoelectronicsComposite materialChemistryOpticsChromatographyQuantum mechanicsOceanographyGeologyPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsHigh-pressure geophysics and materials