Analysis Sensing Voltage of lead zirconate titanate (PZT) Piezoelectric MEMS Gyroscope and comparing with Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)
Sherif A. Ghamry, Ahmed K. Mahmoud, Roshdy A. Abdelrassoul, Iman Morsi
Abstract
Drones, cars, and robots are just a few of the everyday items that use gyroscopes. Coriolis force is used to calculate the angular rate for gyroscopes. Measurement of the lateral motion caused by the Coriolis force, which happens after vibrating of the piezoelectric materials after being stimulated, may be applied to provide the signal indicating the rotation rate of the MEMS gyroscope. Due to the various piezoelectric materials characteristics and how they affect the MEMS gyroscope’s sensitivity to these variations. In order to provide high output power in piezoelectric gyroscopes, piezoelectric materials are essential. The primary requirements for excellent gyroscope include low cost, dependability, deformation, and electrical and thermal characteristics. Zinc oxide (ZnO), barium titanate (BaTiO3), and Aluminum Nitride (AlN) are three common forms of piezoelectric materials. The sensing voltage was studied for them in a previous study using COMSOL, and in this paper lead zirconate titanate (PZT) was studied and its results were compared with the results of the previous study.