Synergistic role of organic additives in enhancing planarization efficiency of magnetorheological slurries
Chi-Ming Chen, Chia‐Chen Li
Topics & Concepts
Chemical-mechanical planarizationSlurryMagnetorheological fluidMaterials scienceChemical engineeringComposite materialPolishingControl engineeringEngineeringDamperGranular flow and fluidized bedsAdvanced Surface Polishing TechniquesTunneling and Rock Mechanics