Two-dimensional particle-in-cell simulation parallelized with graphics processing units for the investigation of plasma kinetics in a dual-frequency capacitively coupled plasma
Ji Hyun Shin, Hwanho Kim, Hae June Lee
Topics & Concepts
PlasmaCapacitively coupled plasmaIonParticle-in-cellElectrodeAtomic physicsKinetic energyElectronMaterials scienceSymmetry (geometry)Computational physicsChemistryPhysicsInductively coupled plasmaGeometryQuantum mechanicsMathematicsOrganic chemistryPhysical chemistryPlasma Diagnostics and ApplicationsSemiconductor materials and devicesElectrostatic Discharge in Electronics