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Characteristics of (Mo-Ta-W)-C and (Nb-Ta-W)-C refractory multi-principal element carbide thin films by non-reactive direct current magnetron co-sputtering

Yiyong Zhang, Bin Zhang, Zhiyuan Jing, Haoxu Wang, Wen Bin Yao, Xiubing Liang

2022Journal of Alloys and Compounds13 citationsDOI

Topics & Concepts

Materials scienceThin filmCarbideAmorphous solidSputter depositionTantalumCarbon filmAmorphous carbonSputteringMetalAnalytical Chemistry (journal)CrystallographyMetallurgyNanotechnologyChemistryOrganic chemistryMetal and Thin Film MechanicsAdvanced materials and compositesDiamond and Carbon-based Materials Research
Characteristics of (Mo-Ta-W)-C and (Nb-Ta-W)-C refractory multi-principal element carbide thin films by non-reactive direct current magnetron co-sputtering | Litcius