Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate
Congming Ke, Shoulin Liu, Yiao Pang, Yongping Wei, Yaping Wu, Qiufa Luo, Yueqin Wu, Jing Lü
Topics & Concepts
Chemical-mechanical planarizationMaterials sciencePolishingAbrasiveSubstrate (aquarium)Crystal (programming language)Gallium nitrideSurface roughnessSingle crystalDiamondSemiconductorMetallurgyChemical engineeringComposite materialOptoelectronicsCrystallographyLayer (electronics)ChemistryProgramming languageComputer scienceOceanographyGeologyEngineeringMetal and Thin Film MechanicsMXene and MAX Phase MaterialsDiamond and Carbon-based Materials Research