Preparation strategy for low-stress and uniform SiC-on-diamond wafer: A silicon nitride dielectric layer
Yuting Zheng, Qinrui Zhang, Guanzhong Qiao, Junjun Wei, Jinlong Liu, Liangxian Chen, Kang An, Xiaotong Zhang, Haitao Ye, Haojun Zhou, Hongliang Tao, Yuhang Yin, Xiaoping Ouyang, Chengming Li
Topics & Concepts
Materials scienceDiamondNucleationWaferChemical vapor depositionSiliconCrystal (programming language)OptoelectronicsLayer (electronics)Composite materialNanotechnologyChemistryProgramming languageComputer scienceOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices