A review of oriented wurtzite-structure aluminum nitride films
Huiqian Yang, Jing Sun, Haijin Wang, Li Hao, Bin Yang, Bin Yang
Topics & Concepts
Wurtzite crystal structureMaterials sciencePiezoelectricityElectromechanical coupling coefficientNitrideOptoelectronicsResonatorPiezoelectric coefficientAluminium nitrideDopingNanotechnologyEngineering physicsAluminiumComposite materialMetallurgyLayer (electronics)ZincEngineeringAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsMechanical and Optical Resonators