The pressure dependence of structure and composition of sputtered AlCrSiTiMoO high entropy thin film
Nastaran Behravan, Alireza Farhadizadeh, Saeed Ghasemi, A Khademi, Hojat Shojaei, Hamid Ghomi
Topics & Concepts
Materials scienceThin filmSputteringSputter depositionArgonField emission microscopyAnalytical Chemistry (journal)SiliconScanning electron microscopeCrystallinityComposite materialDiffractionOpticsMetallurgyChemistryNanotechnologyPhysicsOrganic chemistryChromatographyHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics