Mechanical and tribological behaviors of hard and tough TaxHf1−xN films with various Ta contents
Xuping Zhao, Hang Li, Jianliang Li, Jiaojiao Hu, Jiewen Huang, Jian Kong, Qiujie Wu, Yan Shi, Dangsheng Xiong
Topics & Concepts
Materials scienceFracture toughnessTantalumTribologyComposite materialToughnessSputter depositionSputteringResidual stressAlloyThin filmMetallurgyNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research