Reverse leakage and breakdown mechanisms of vertical GaN-on-Si Schottky barrier diodes with and without implanted termination
Xiaolu Guo, Yaozong Zhong, Xin Chen, Yu Zhou, S. S. Su, Shumeng Yan, Jianxun Liu, Xiujian Sun, Qian Sun, Hui Yang
Abstract
This Letter studies the reverse leakage and breakdown mechanisms of vertical GaN-on-Si Schottky barrier diodes (SBDs) with and without argon-implanted termination (ArIT). The electrical leakage characteristics in the vertical GaN-on-Si SBD without edge termination sequentially go through the thermionic field emission, variable range hopping (VRH), and trap-assisted tunneling conduction mechanisms as the reverse bias increases gradually. Its leakage and breakdown mechanisms are limited by the edge electric field crowding effect. While for the vertical GaN-on-Si SBD with ArIT (ArIT-SBD), the electrons conduction at a low reverse bias, following the space-charge-limited conduction (SCLC) model, is limited by the damage-induced traps in the implanted GaN. As the reverse bias increases up to the occurrence of breakdown, the VRH and SCLC dominate the leakage mechanism of the ArIT-SBD, which stem from intrinsic traps in GaN grown on Si. A rapidly growing leakage under a low reverse bias and enhanced breakdown voltage performance in the ArIT-SBD is attributed to the charging of the damage-induced traps in implanted GaN. This Letter not only gives in-depth insights of vertical GaN-on-Si SBDs but also provides a useful design guidance of implanted termination for high-voltage power devices.