Controlling the crystallinity of HfO2 thin film using the surface energy-driven phase stabilization and template effect
Aejin Lee, Byung Seok Kim, Ji Hyeon Hwang, Young Jin Kim, Hansol Oh, YongJoo Park, Woojin Jeon
Topics & Concepts
CrystallinityMaterials scienceTetragonal crystal systemCrystallizationThin filmDopantDielectricAmorphous solidMonoclinic crystal systemPhase (matter)FerroelectricitySurface energyPermittivityLayer (electronics)Chemical engineeringAnalytical Chemistry (journal)DopingOptoelectronicsComposite materialNanotechnologyCrystallographyCrystal structureChemistryOrganic chemistryEngineeringSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvancements in Semiconductor Devices and Circuit Design