Low power AlGaN/GaN MEMS pressure sensor for high vacuum application
Jianwen Sun, Dong Hu, Zewen Liu, Luke M. Middelburg, Sten Vollebregt, P.M. Sarro, Guoqi Zhang
Topics & Concepts
Materials scienceHeterojunctionOptoelectronicsMicroelectromechanical systemsUltra-high vacuumPressure sensorWide-bandgap semiconductorGallium nitrideLinearitySensitivity (control systems)NanotechnologyElectrical engineeringElectronic engineeringEngineeringPhysicsLayer (electronics)ThermodynamicsGaN-based semiconductor devices and materialsGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator Technologies