Investigation on the machinability of copper-coated monocrystalline silicon by applying elliptical vibration diamond cutting
Jianguo Zhang, Zhenfeng Shen, Xiaoqing Li, Huixin Yuan, Junjie Zhang, Xiao Chen, Junfeng Xiao, Jianfeng Xu
Topics & Concepts
MachinabilityMaterials scienceMonocrystalline siliconSiliconDiamond turningMachiningDiamond toolChip formationDiamondMetallurgyBrittlenessCoatingComposite materialCopperTool wearAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications