Highly sensitive hybrid silicon carbonitride piezoresistive sensors enabled by coupling piezoelectric effect
Qi Zhou, Duo Yang, Pengchong Xu, Wei Xue, Ningbo Liao
Topics & Concepts
Piezoresistive effectPiezoelectricityMaterials scienceSiliconCoupling (piping)OptoelectronicsNanotechnologyComposite materialAdvanced MEMS and NEMS TechnologiesGas Sensing Nanomaterials and SensorsAdvanced Sensor and Energy Harvesting Materials