MEMS hydrogen gas sensor with wireless quartz crystal resonator
Lianjie Zhou, Fumihito Kato, Nobutomo Nakamura, Yasushi Oshikane, Akira Nagakubo, Hirotsugu Ogi
Topics & Concepts
Microelectromechanical systemsQuartzResonatorWirelessMaterials scienceHydrogenCrystal (programming language)OptoelectronicsCrystal oscillatorAcousticsNanotechnologyComposite materialComputer scienceTelecommunicationsChemistryPhysicsOrganic chemistryProgramming languageGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator TechnologiesAdvanced Chemical Sensor Technologies