High-<i>k</i>dielectrics for 4H-silicon carbide: present status and future perspectives
Amna Siddiqui, Rabia Yasmin Khosa, Muhammad Usman
Abstract
Unleashing the true merits of high-<italic>κ</italic>dielectrics for 4H-SiC by taking a closer look at the morphological, structural, interfacial, and electrical behavior of the high-<italic>κ</italic>dielectric/4H-SiC system.
Topics & Concepts
Materials scienceDielectricSilicon carbideCarbideHigh-κ dielectricEngineering physicsNanotechnologyOptoelectronicsComposite materialPhysicsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability